To provide a force sensor and a method of manufacturing the same capable of increasing the durability of a silicon pressure receiving part by a simple constitution and a simple manufacturing process.
In the force sensor which includes a displacement part formed of a silicon substrate and a silicon pressure receiving part protruded on the silicon substrate and transmitting a load from an external means to the displacement part and outputs an electric signal according to the amount of the displacement of the displacement part, a plurality of steps of pressure receiving surfaces having different height positions and planar positions are formed on the silicon pressure receiving part. An inclination surface the diameter of which increases as a height position is lowered is provided at the outer circumferential edge of the pressure receiving surface of each step.
UMETSU EIJI
HIRAYAMA MOTOTERU
ISHIZONE MASAHIKO
