Title:
FORCE SENSOR, TEMPERATURE SENSOR, AND TEMPERATURE/FORCE SENSOR DEVICE
Document Type and Number:
Japanese Patent JP2639308
Kind Code:
B
Abstract:
PURPOSE: To provide a pressure sensor, a temperature sensor, and a temperature pressure sensor device with improved sensitivity, environmental resistance, and reliability.
CONSTITUTION: An Si substrate 1 is formed partially and thinly as a support part 3, an emitter electrode 4 for releasing electrons and a gate electrode 5 are formed on a movable part 2 which is connected to the Si substrate 1 via the support part 3 and is displaced by pressure, and at the same time an anode electrode 6 which is an electron-absorbing part is formed on a thick part 9. Therefore, when the movable part 2 is displaced by pressure, the amount of released electrons 15 which are absorbed by the anode electrode 6 is reduced accordingly and output anode current is also reduced, thus measuring acceleration from the change rate.
Inventors:
Amano, Akira
Matsuzaki, Kazuo
Sakai, Toshiaki
Matsuzaki, Kazuo
Sakai, Toshiaki
Application Number:
JP1993000165269
Publication Date:
April 25, 1997
Filing Date:
July 05, 1993
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
International Classes:
G01K5/28; G01D5/48; G01L1/00; G01L1/18; G01L9/00; G01L11/00; G01P15/08; G01K5/00; G01D5/48; G01L1/00; G01L1/18; G01L9/00; G01L11/00; G01P15/08; (IPC1-7): G01L1/00; G01K5/28; G01P15/08