Title:
FORCE SENSOR
Document Type and Number:
Japanese Patent JP3186975
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a strong and durable resonance micro bridge acceleration meter by converting the influence of a fluid acceleration force to the change in resonance frequency for a force-sensitive mass spring system.
SOLUTION: In a force converter 10 manufactured by a silicon substrate 15, both edge parts of a flat polygon with a certain thickness are constituted while being suspended by thinner and semi-thick deflection springs 30 and 31 and both springs are fixed to a stiff frame 16 with a main axis in a same direction Y. Also, one surface of both springs is level with the surface of the mass 20 and the vertical center flat surface at the semi-thick position is eccentric to the center flat surface of the mass 20. Then, vibration is set by the translation and rotary move of the mass 20 due to both springs and a fluid acceleration which operates on the mass 20 changes spring stress and generates a detectable change in the stiffness of a spring, thus changing the resonance frequency in vibration mode. Also, the resonance mode is set as a one-piece move of both springs and the mass 20 and acceleration changes mechanical stress, both spring stiffness and the mass 20, and generates a detectable change in the resonance frequency.
Inventors:
Henrik Jacobsen
Terjee Kubisterloy
Terjee Kubisterloy
Application Number:
JP11300096A
Publication Date:
July 11, 2001
Filing Date:
April 11, 1996
Export Citation:
Assignee:
Sensonor AS
International Classes:
G01L9/00; G01P15/097; G01L1/10; G01P15/10; G01P15/125; G01V1/18; (IPC1-7): G01P15/10; G01L9/00
Domestic Patent References:
| JP61187626A | ||||
| JP611400A | ||||
| JP6160421A | ||||
| JP62188926A | ||||
| JP2183167A | ||||
| JP3501530A | ||||
| JP3501527A |
Other References:
【文献】米国特許5567879(US,A)
【文献】米国特許4805456(US,A)
【文献】英国特許出願公開2215053(GB,A)
【文献】米国特許4805456(US,A)
【文献】英国特許出願公開2215053(GB,A)
Attorney, Agent or Firm:
Heikichi Odashima