Title:
FOREIGN MATTER CORRECTION DEVICE
Document Type and Number:
Japanese Patent JPH08150547
Kind Code:
A
Abstract:
PURPOSE: To provide a foreign matter correction device capable of correcting a foreign matter like a projected part without making contact with a peripheral part.
CONSTITUTION: A foreign matter like a projection on the surface of a color filter 1 is polished and removed by pressing a head end of a polishing head 5 on a machined surface position measuring mechanism 10, reading an output of a non-contact sensor 9 at that time, moving and XY table 3 and lowering the polishing head 5 in accordance with a read sensor output.
Inventors:
SARUTA MASAHIRO
SAITO TAKANORI
SAITO TAKANORI
Application Number:
JP28954594A
Publication Date:
June 11, 1996
Filing Date:
November 24, 1994
Export Citation:
Assignee:
NTN TOYO BEARING CO LTD
International Classes:
G02B5/20; B24B7/02; B24B47/20; B24B49/10; G02F1/1335; (IPC1-7): B24B7/02; B24B47/20; B24B49/10; G02B5/20; G02F1/1335
Attorney, Agent or Firm:
Fukami Hisaro (2 outside)
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