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Title:
FOREIGN MATTER DETECTION METHOD AND FOREIGN MATTER DETECTION DEVICE
Document Type and Number:
Japanese Patent JP2013072702
Kind Code:
A
Abstract:

To stably detect a foreign matter with high accuracy while simplifying an initial setting and operation.

A foreign matter detection device 1 equipped with a cavity resonator 10 includes a self-oscillation circuit 11 for oscillating a resonant signal from a cavity resonator 10 and a foreign matter detection unit 12 for detecting a foreign matter by using variation of a resonant frequency of the resonant signal when there is a foreign matter. The self-oscillation circuit 11 has a band pass filter 20 for making the resonant signal of a specific resonant frequency pass through. The foreign matter detection unit 12 includes a frequency measurement section 30 for measuring a resonant frequency of the resonant signal and an information processing section 31 for detecting a foreign matter by variation of the resonant frequency measured by the frequency measurement section 30.


Inventors:
IKEDA MASATO
Application Number:
JP2011211034A
Publication Date:
April 22, 2013
Filing Date:
September 27, 2011
Export Citation:
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Assignee:
ASAHI KASEI ENGINEERING KK
International Classes:
G01N22/02; G01N22/00
Domestic Patent References:
JPS63210757A1988-09-01
JP2002507752A2002-03-12
JPH08307199A1996-11-22
JP2002233350A2002-08-20
JP2011220684A2011-11-04
JP2010276416A2010-12-09
JPH0528958U1993-04-16
JP2009058379A2009-03-19
JPS63210757A1988-09-01
JP2002507752A2002-03-12
JPH08307199A1996-11-22
JP2002233350A2002-08-20
JP2011220684A2011-11-04
Foreign References:
US20020121906A12002-09-05
WO2001084135A12001-11-08
WO2009139238A12009-11-19
US4890054A1989-12-26
US4943778A1990-07-24
US20020121906A12002-09-05
WO2001084135A12001-11-08
WO2009139238A12009-11-19
US4890054A1989-12-26
US4943778A1990-07-24
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito



 
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