Title:
FOREIGN MATTER REMOVAL METHOD FOR TEMPLATE, PRODUCTION METHOD OF TEMPLATE AND BASE PLATE FOR FOREIGN MATTER REMOVAL
Document Type and Number:
Japanese Patent JP2015223770
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a foreign matter removal method for a template which enables removal of foreign matter in a concave part of an uneven structure of a template while suppressing breakage of the template, a production method of the template and a base plate for foreign matter removal.SOLUTION: A foreign matter removal method for a template uses a base plate for foreign matter removal having a base part and a convex part protruding from the base part and comprises arranging a curable material on the upper surface of the convex part, bringing the curable material arranged on the upper surface of the convex part in contact with an irregular structure of a template opposing the curable material and adhered with foreign matter, hardening the curable material and separating the curable material from the template.
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Inventors:
HIRAKA TAKAAKI
Application Number:
JP2014110181A
Publication Date:
December 14, 2015
Filing Date:
May 28, 2014
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
B29C33/72; B29C59/02; H01L21/027
Domestic Patent References:
| JP2013008911A | 2013-01-10 | |||
| JP2014060385A | 2014-04-03 | |||
| JP2012200988A | 2012-10-22 | |||
| JP2014036042A | 2014-02-24 |
Attorney, Agent or Firm:
Hiromi Fujimasu
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi
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