Title:
載置台における異物の検出方法、及び、検出装置
Document Type and Number:
Japanese Patent JP7353190
Kind Code:
B2
Abstract:
A method of detecting a foreign object on a stage according to one aspect of the present disclosure includes acquiring first position information of a first pattern included in a first image in a reference state of a surface of the stage capable of attracting an object to be inspected; acquiring second position information of a second pattern included in a second image of the surface, the second image being obtained after obtaining the first image; and detecting one or more foreign objects on the surface by comparing the first position information and the second position information.
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Inventors:
Kenta Saiki
Takuya Ishida
Takuya Ishida
Application Number:
JP2020002964A
Publication Date:
September 29, 2023
Filing Date:
January 10, 2020
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01N21/94; G01N21/88
Domestic Patent References:
| JP2003234265A | ||||
| JP2000124122A | ||||
| JP2009162717A | ||||
| JP62086740A | ||||
| JP61017147A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito