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Patent Searching and Data


Title:
FORMATION OF CARBON COATING FILM ON SMALL BODY
Document Type and Number:
Japanese Patent JPH02188448
Kind Code:
A
Abstract:

PURPOSE: To form a uniform carbon coating film on a small body by heating the small body suspended in a flow of a gas not reacting with the body to a prescribed temp., introducing starting material for forming a carbon film into the flow and thermally decomposing the starting material.

CONSTITUTION: A small body is suspended in a flow of a gas not reacting with the body, this system contg. the small body is heated to a prescribed temp. and starting material for forming a carbon film is introduced into the flow to form a carbon coating film on the small body.


Inventors:
EGUCHI MINORU
YOSHIDA MASAJI
Application Number:
JP633989A
Publication Date:
July 24, 1990
Filing Date:
January 13, 1989
Export Citation:
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Assignee:
NEC CORP
International Classes:
C01B31/04; C03C17/22; (IPC1-7): C01B31/04; C03C17/22
Attorney, Agent or Firm:
Uchihara Shin