PURPOSE: To form an electrode pattern in excellent reproducibility and efficiency by forming a thin film of an electrode material on the whole surface of a substrate, which is formed with a plurality of thermister thin films, and by etching the former thin film by the photoringraphy.
CONSTITUTION: A substrate 1 is formed by the vacuum evaporation or a sputtering method with a plurality of thin film thermisters 11 (shown in Fig. (a)) of an alloy of cobalt-manganese. The thermisters 11 are oxidized, and the substrate 1 is formed on its all surface with an electrode thin film 4 of an electrode material such as gold, as shown in Fig. (b). Then, the unnecessary portion of the thin film 4 is etched off by the photoringraphy so that a plurality of electrode patterns 41 are formed at preset positions, as shown in Fig. (c). Then, the respective thermisters are cut off from the substrate 1, as shown in Fig. (d), and a lead wire 51 is bonded to the electrodes 41 thereby to produce a thermister bolometer, as shown in Fig. (e).
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