Title:
FORMATION OF ELECTRODE
Document Type and Number:
Japanese Patent JPH11260848
Kind Code:
A
Abstract:
To provide a method for forming an electrode, which prevents a metal pillar formed in an opening formed in a photoresist from being tapered, and thereby can form a very fine metal electrode which has a rectangular or trapezoidal cross-sectional shape and has a large aspect ratio (height/bottom face length).
On a substrate 1, a photoresist pattern 2 having a reverse- tapered opening is formed. With this resist pattern 2 as a mask metal films are deposited 3-1, 3-2 by vacuum evaporation. After that, the substrate 1 is dipped in a solvent to dissolve the resist layer and eliminate the metal film on the resist, and thereby a fine metal electrode pillar 3-2 can be obtained on the substrate 1.
Inventors:
HAYASHIDA TETSUYA
TAJIMA TOSHIFUMI
TAKIGUCHI YOSHIRO
KOSUGI MITSUO
WATANABE TOSHIHIDE
ABE MASAHIDE
TAJIMA TOSHIFUMI
TAKIGUCHI YOSHIRO
KOSUGI MITSUO
WATANABE TOSHIHIDE
ABE MASAHIDE
Application Number:
JP7499798A
Publication Date:
September 24, 1999
Filing Date:
March 10, 1998
Export Citation:
Assignee:
JAPAN BROADCASTING CORP
International Classes:
H01L21/3205; H01L21/203; H01L21/28; H01L21/306; H01L21/60; (IPC1-7): H01L21/60; H01L21/203; H01L21/28; H01L21/306; H01L21/3205
Attorney, Agent or Firm:
Akihide Sugimura (8 outside)