PURPOSE: To prevent the deformation of a low m.p. substrate and to obtain a film having good quality in a short time in a method of sticking an evaporating material or the ionized material thereof like a film onto the substrate held by a holder by interposing a specific material between the substrate and the holder.
CONSTITUTION: The inside of a chamber 1 to be evacuated is properly evacuated and the beam from an electron gun 5 is irradiated to the material 4 in a crucible 3. The particles of the material 4 evaporated by said radiation are stuck like a film on the surface of a substrate 9 held by a substrate holder 7 made of metal such as Al having large specific heat. The substrate 9 of a low m.p. such as plastics is mounted to the holder 7 through a material 8 having good heat conductivity and elasticity, for example, a BN-contg. thin sheet. Since the packing 8 has elasticity, no clearance is formed at all between the substrate 9 and the holder 7 when the film sticks to the substrate. Even if the radiation heat from the crucible 3 arrives at the substrate 9, the heat escapes to the holder 7 through the packing 8 on account of the good heat conductivity of the packing 8' and the heating of the substrate 9 does not pipe above the deformation temp. of the substrate 9.
OGAWA HIROYUKI
WATANABE KANJI
| JPS5542049U | 1980-03-18 |