PURPOSE: To obtain a thin film excellent in electrical conductivity, homogeneity, and magnetic shielding effect by degreasing the outer surface of a cylinder made of a ceramic substrate, sticking a metal foil with the necessary pattern, arranging it in a vacuum container, and depositing a superconductor thin film with a fine pattern on the metal foil.

CONSTITUTION: A metal foil 2 of the necessary pattern made of aluminum, stainless steel, copper, titanium, nickel copal is stuck to the surface of a cylinder 1 made of a ceramic substrate, it is arranged in a vacuum container, and the container is set to a vacuum of 10-6W10-8Torr. A superconductor made of an La-Sr-Cu-O system or a Y-Ba-Cu-O system or an organic substance and provided at the bottom of the container is heated and evaporated, and a superconductor thin film 3 with a fine pattern is deposited on the surface of the metal foil 2 while the cylinder 1 is rotated. The superconductor thin film with good characteristic is thereby obtained, and this is suitable for a component for the microwave communication equipment.