Title:
FORMATION METHOD OF MAGNETIC FILM
Document Type and Number:
Japanese Patent JP2019002041
Kind Code:
A
Abstract:
To provide a formation method of a magnetic film capable of heightening conversion efficiency in a spin Seebeck element.SOLUTION: A formation method of a magnetic film includes steps of: forming two magnetic films MF mainly composed of a magnetic material containing oxygen and having insulation property, namely, forming the two magnetic films MF in which at least either magnetic film MF is in an amorphous state; and heating the two magnetic films MF in the state where the two magnetic films are faced mutually, to thereby crystallize the magnetic film MF in the amorphous state.SELECTED DRAWING: Figure 3
Inventors:
NOZUE TATSUHIRO
NISHIBASHI TSUTOMU
MURAKAMI HIROHIKO
SAITO EIJI
NIIZEKI TOMOHIKO
HIOKI TOMONORI
NISHIBASHI TSUTOMU
MURAKAMI HIROHIKO
SAITO EIJI
NIIZEKI TOMOHIKO
HIOKI TOMONORI
Application Number:
JP2017117180A
Publication Date:
January 10, 2019
Filing Date:
June 14, 2017
Export Citation:
Assignee:
ULVAC CORP
UNIV TOHOKU
UNIV TOHOKU
International Classes:
C23C14/08; C23C14/58; H01F41/18; H01L29/82; H01L37/04
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda