Title:
FORMATION OF MICROWAVE CIRCUIT
Document Type and Number:
Japanese Patent JP3168091
Kind Code:
B2
Abstract:
PURPOSE: To provide a circuit forming method using a three-dimensional mask having the same surface as a microwave circuit forming surface and capable of preventing the loss of exposure light energy and the deterioration of the resin of a light pervious part.
CONSTITUTION: A photo-setting liquid resin 4 is cured while irradiated with laser beam to form a photo-set resin part 2 and a three-dimensional mask is formed by forming the same surface as the circuit forming surface of a microwave circuit board and, at the same time, the part 3 corresponding to the light pervious part of the three-dimensional mask is opened in a slit shape without performing the irradiation with laser beam and, further, a metal film 8 is bonded to the three-dimensional mask 3 by electroless plating to form a light shading part and the microwave circuit exposing mask 6 thus formed is used to form a microwave circuit.
Inventors:
Toshiyuki Suzuki
Yoshiyuki Uchino
Koji Nakajima
Hiroaki Kitamura
Sakuo Kamata
Ryuji Ohtani
Go Okamoto
Yoshiyuki Uchino
Koji Nakajima
Hiroaki Kitamura
Sakuo Kamata
Ryuji Ohtani
Go Okamoto
Application Number:
JP2851693A
Publication Date:
May 21, 2001
Filing Date:
January 25, 1993
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
B29C67/00; G03F1/68; G03F1/76; G03F7/20; H05K3/00; H05K3/06; H05K3/18; B29K105/24; H05K1/00; (IPC1-7): H05K3/00; G03F1/08; G03F7/20; H05K3/06
Domestic Patent References:
| JP5427367A | ||||
| JP5427368A | ||||
| JP2111528A | ||||
| JP2251959A |
Attorney, Agent or Firm:
Michio Takayama (1 outside)