Title:
FORMATION OF MULTIPLE OXIDE SUPERCONDUCTING THIN FILM
Document Type and Number:
Japanese Patent JPH04331716
Kind Code:
A
Abstract:
PURPOSE: To form the title thin film excellent in film characteristics.
CONSTITUTION: In the film formation using an evaporation source for oxides or a multiple oxide, the evaporation source is put to oxygen-enriching treatment in advance.
Inventors:
HATTORI HISAO
HIGAKI KENJIRO
ITOZAKI HIDEO
HIGAKI KENJIRO
ITOZAKI HIDEO
Application Number:
JP13184291A
Publication Date:
November 19, 1992
Filing Date:
May 07, 1991
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C01B13/14; C01G1/00; C01G3/00; H01B12/06; H01B13/00; H01L39/24; (IPC1-7): C01B13/14; C01G1/00; C01G3/00; H01B12/06; H01B13/00; H01L39/24
Attorney, Agent or Firm:
Takashi Koshiba
Previous Patent: パケットデータサービスのための無線リソース割当システムおよび無線リ...
Next Patent: ALKALINE AQUEOUS SOLUTION OF HYDROGEN PEROXIDE AND STABILIZATION THEREOF
Next Patent: ALKALINE AQUEOUS SOLUTION OF HYDROGEN PEROXIDE AND STABILIZATION THEREOF