Title:
FORMATION OF ORGANIC THIN FILM
Document Type and Number:
Japanese Patent JPS6086266
Kind Code:
A
Abstract:
PURPOSE: To form a strong film not containing a three-dimensionally crosslinked polymer at a high speed, by irradiating an org. compound with laser beam with a predetermined wavelength in vacuum and scattering the same to form a thin film to the surface of a substrate.
CONSTITUTION: A laser oscillating apparatus 1 for oscillating laser beam 2 with a wavelength of 190W400nm having energy corresponding to the chemical bonding energy of an org. compound coming to an evaporation source is prepared. Subsequently, laser beam 2 oscillating from said apparatus 1 is allowed to irradiate the org. compound 8 provided in a vacuum tank 3 and the org. compound 8 is scattered to form the thin film of the org. compound on the surface of a substrate.
Inventors:
TANAKA MASAHIRO
AZUMA KAZUFUMI
NATE KAZUO
NAKATANI MITSUO
AZUMA KAZUFUMI
NATE KAZUO
NAKATANI MITSUO
Application Number:
JP19089883A
Publication Date:
May 15, 1985
Filing Date:
October 14, 1983
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B05D3/06; C23C14/12; C23C14/24; C23C14/28; (IPC1-7): C23C14/12; C23C14/28
Attorney, Agent or Firm:
Masami Akimoto
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