Title:
FORMATION OF OXIDE SUPRCONDUCTING JOSEPHSON ELEMENT
Document Type and Number:
Japanese Patent JPH06132577
Kind Code:
A
Abstract:
PURPOSE: To form an oxide superconducting Josephson element having the step structure of a single grain boundary.
CONSTITUTION: When a tantalum superthin film 2 is vapor-deposited on a dielectric material substrate 1 and a resist 3 is applied on the film 2 to etch, a mask using the film 2 is formed. Then, an ion beam is applied to form a step by etching and after that, the tantalum superthin film used as the mask is removed. A superconducting thin) film is formed on the substrate 1 formed with the step in such a way as to form an oxide superconducting Josephson element.
Inventors:
TSURU KOUJI
MICHIGAMI OSAMU
YANAGISAWA KEIICHI
MICHIGAMI OSAMU
YANAGISAWA KEIICHI
Application Number:
JP28268492A
Publication Date:
May 13, 1994
Filing Date:
October 21, 1992
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01L39/24; (IPC1-7): H01L39/24
Attorney, Agent or Firm:
Toshiro Mitsuishi (1 person outside)
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