Title:
FORMATION OF PARTITION WALL
Document Type and Number:
Japanese Patent JP11352699
Kind Code:
A
Abstract:
To form a partition wall for a plasma display having satisfactory height and precision by perfectly developing the pattern part of a photosensitive compsn. for a plasma display and perfectly removing the non-pattern part without collapsing the formed pattern when the photosensitive compsn. is developed.
Water or an aq. alkali soln. is pressure-jetted on a photosensitive compsn. contg. inorg. fine particles applied on a substrate in 15-300 μm thickness and patternwise exposed to develop the photosensitive compsn. while removing the dissolution residue by the jetting pressure and the objective partition wall for a plasma display is formed.
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Inventors:
Takagi, Yoshihiro
Application Number:
JP1998000159394
Publication Date:
December 24, 1999
Filing Date:
June 08, 1998
Export Citation:
Assignee:
FUJIFILM OLIN CO LTD
International Classes:
G03F7/004; G02F1/1333; G03F7/00; G03F7/30; G09F9/30; H01J9/02; H01J11/02; H01J17/49; G03F7/004; G02F1/13; G03F7/00; G03F7/30; G09F9/30; H01J9/02; H01J11/02; H01J17/49; (IPC1-7): G03F7/30; G03F7/004; G09F9/30; H01J9/02; H01J11/02