Title:
FORMATION OF PHTHALOCYANINE FILM
Document Type and Number:
Japanese Patent JPH07211958
Kind Code:
A
Abstract:
PURPOSE: To directly form a phthalocyanine film on the surface of a substrate in the same crystal system as that of the raw material.
CONSTITUTION: At the time of forming a phthalocyanine film on a substrate by evaporating the raw material of phthalocyanine, the raw material is evaporated by using an electron beam method.
Inventors:
IIJIMA MASAYUKI
Application Number:
JP177294A
Publication Date:
August 11, 1995
Filing Date:
January 12, 1994
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G03G5/05; C09B47/04; G03G5/06; H01L31/08; H01L51/10; H01L51/42; (IPC1-7): H01L51/10; H01L31/08; C09B47/04; G03G5/05; G03G5/06
Attorney, Agent or Firm:
Kinichi Kitamura (2 others)