Title:
FORMATION OF SMOOTH THIN FILM
Document Type and Number:
Japanese Patent JPH06122960
Kind Code:
A
Abstract:
PURPOSE: To inexpensively and easily form a thin film containing a smoothing vapor-depositive material on the surface of a substrate for a short time.
CONSTITUTION: The substrate 2 is coated with TiN by vapor depositing Ti with nitrogen ion beam 4 and simultaneously is irradiated with nitrogen ion beam 5 for making flat in a direction crossing the coating direction of TiN at the surface. TiN to be applied on the recessed part of the substrate 2 is applied on the recessed part which is in the shade of a projecting part as it is and TiN to be applied on the projecting part is sputtered and does not applied on the projecting part.
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Inventors:
TOJO SATOSHI
MARUMOTO IKURO
MARUMOTO IKURO
Application Number:
JP27277792A
Publication Date:
May 06, 1994
Filing Date:
October 12, 1992
Export Citation:
Assignee:
TOYOTA MOTOR CORP
International Classes:
C23C14/06; C23C14/22; (IPC1-7): C23C14/06; C23C14/22
Attorney, Agent or Firm:
Hiroshi Okawa
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