PURPOSE: To form thin films on a large quantity of columnar base bodies by specifying the geometric size to prevent the base bodies from dislodging from holding members.
CONSTITUTION: The columnar base bodies 3 are agitated while the base bodies are inclined in the base body holding members 1 when the holding members 1 are rotated. The conditions to prevent the base bodies 3 having a length L from dislodging from the holding members 1 are L2>(m+c)2+b2--a2 when the diameter at the central axis of the holding members 1 is designated as (a), the inside diameter of a recessed part as (b), the recessing depth of the recessed part as (c) and the distance between the inner side end faces of the holding members 1 as (m). As a result, the dislodgment of the circular columnar base bodies 3 is entirely obviated and the thin films are uniformly formed on all the base bodies.
KUROKAWA HIDEO
MITANI TSUTOMU
