Title:
FORMATION OF THIN FILM, THIN FILM FORMING DEVICE AND EVAPORATING SOURCE CRUCIBLE
Document Type and Number:
Japanese Patent JPH1180937
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a thin film forming method suppressing splashes in a vacuum depositing stage, making the film forming rate high and perverting deterioration in the quality of thin film caused by splashes, to provide a thin film forming device and to provide an evaporating source crucible. SOLUTION: In a method for forming thin film on a magnetic tape, a magnetic disk or the like having a stage in which an evaporating source crucible 10 at least contg. impurity oxide is used, and a thin film forming material 9 such as magnetic metals, magnetic alloys, magnetic compds. or the like is melted to evaporate in a vacuum to form thin film contg. the thin film forming material 9 on a supporting body 3a, the thermal conductivity of the main raw material of the evaporating source crucible 10 is regulated to <=30J.s<-1> .m<-1> .K<-1> . The main raw material of the evaporating source crucible 10 preferably contains at least one kind among zirconia, calcia and spinel.
Inventors:
CHIBA KAZUNOBU
TAKEDA TSUTOMU
TAKEDA TSUTOMU
Application Number:
JP23858297A
Publication Date:
March 26, 1999
Filing Date:
September 03, 1997
Export Citation:
Assignee:
SONY CORP
International Classes:
C23C14/24; C23C14/30; C23C14/32; F27B14/10; G11B5/85; (IPC1-7): C23C14/24; C23C14/30; C23C14/32; F27B14/10
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