Title:
FORMATION OF THIN FILM USING LASER ABRATION AND LASER ABRATION DEVICE
Document Type and Number:
Japanese Patent JPH08225929
Kind Code:
A
Abstract:
PURPOSE: To provide a thin film forming method using a laser abration, by which the thin film having uniform thickness and composition in the wide area can be formed.
CONSTITUTION: The laser beam emitted from a laser beam oscillator 1 is reflected by galvano mirrors 3, 5 and further, introduced to a condensor lens 7 arranged on moving mechanism movable in two directions mutually crossing at right angle in the plane. Further, the laser beam irradiates a round disk target 12 arranged parallel with the moving range in the moving mechanism 9, 10 in a vacuum vessel 11. By this method, the thin film having uniform film thickness and small difference of the composition can be formed in large area on a substrate.
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Inventors:
NISHIKAWA YUKIO
YOSHIDA ZENICHI
YOSHIDA ZENICHI
Application Number:
JP3487695A
Publication Date:
September 03, 1996
Filing Date:
February 23, 1995
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C23C14/28; (IPC1-7): C23C14/28
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)
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