To provide a DLC formed article that has a DLC multilayer film thereon which contains a DLC (diamond like carbon) film with high hardness in the outermost surface side, and has excellent adhesiveness to both of a substrate and a DLC film even when the formed DLC multilayer film is as thick as 3 μm or thicker, on the substrate made from a wide range of a material from a high hardness material to a low hardness material, and that has excellent abrasion resistance.
The formed article with the hard DLC multilayer film comprises: the substrate 1; the DLC-based film 3; and an intermediate layer 2 existing between the substrate 1 and the DLC-based film 3. The DLC-based film 3 comprises sequentially from the substrate 1 side: a first DLC-based film 3a and a second DLC-based film 3b. The first DLC-based film 3a has the surface hardness in a range between 10 GPa and 40 GPa when measured with a nano-indentation test, and the second DLC base film 3b has the surface hardness in a range of >40 GPa and ≤90 GPa when measured with the nano-indentation test.
Oota, Akitoshi
