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Title:
FORMED ARTICLE WITH HARD MULTILAYER FILM OF DIAMOND-LIKE CARBON, AND PRODUCTION METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2007070667
Kind Code:
A
Abstract:

To provide a DLC formed article that has a DLC multilayer film thereon which contains a DLC (diamond like carbon) film with high hardness in the outermost surface side, and has excellent adhesiveness to both of a substrate and a DLC film even when the formed DLC multilayer film is as thick as 3 μm or thicker, on the substrate made from a wide range of a material from a high hardness material to a low hardness material, and that has excellent abrasion resistance.

The formed article with the hard DLC multilayer film comprises: the substrate 1; the DLC-based film 3; and an intermediate layer 2 existing between the substrate 1 and the DLC-based film 3. The DLC-based film 3 comprises sequentially from the substrate 1 side: a first DLC-based film 3a and a second DLC-based film 3b. The first DLC-based film 3a has the surface hardness in a range between 10 GPa and 40 GPa when measured with a nano-indentation test, and the second DLC base film 3b has the surface hardness in a range of >40 GPa and ≤90 GPa when measured with the nano-indentation test.


Inventors:
Akari, Kouichirou
Oota, Akitoshi
Application Number:
JP2005000257083
Publication Date:
March 22, 2007
Filing Date:
September 05, 2005
Export Citation:
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Assignee:
KOBE STEEL LTD
International Classes:
C23C14/06; B23B27/14