Title:
FORMING DEVICE FOR FILM
Document Type and Number:
Japanese Patent JPS5917236
Kind Code:
A
Abstract:
PURPOSE:To prevent the deterioration of the film formed to the surface of a substrate, and to maintain a function of an exhaust device perfectly by internally setting up a collecting means for a material coated detachably to a film forming chamber. CONSTITUTION:Target particles as the material coated are generated from a target 13 through a collision with the target 13 of ions in gas plasma. The target particles scatter not only in the direction of the substrates 40 placed and held on a substrate holder 12 but also to the whole in the film forming chamber 10. Target particles scattering toward the inner surface of the film forming chamber 10 in the particles soldify and adhere and are collected to the collecting means 15 for the material coated before they reach the inner surface of the film forming chamber 10. The soldifying and adhering target particles grow so as to wind around the collecting means 15 for the material coated. When the solidification and growth of the target particles progress and the collecting means 15 for the material coated is brought to a clogged state, the collecting means 15 for the material coated is extracted outside the film forming chamber 10, solidifying and growing target particles are removed and regenerated, and the means is internally set up to the film forming chamber 10 again or replaced with a new collecting means 15.
Inventors:
KANAI NORIO
ISHIDA YOSHIHISA
ISHIDA YOSHIHISA
Application Number:
JP12568482A
Publication Date:
January 28, 1984
Filing Date:
July 21, 1982
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C23C14/34; C23C14/00; H01L21/20; H01L21/203; (IPC1-7): C23C15/00; H01L21/203
Domestic Patent References:
| JPS5322831A | 1978-03-02 |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)