Title:
FORMING DEVICE OF REFLECTION PREVENTIVE FILM
Document Type and Number:
Japanese Patent JPS5660072
Kind Code:
A
Abstract:
PURPOSE:To readily control for obtaining an optimum reflection preventive film thickness by irradiating a light having predetermined wavelength to a photovoltaic semiconductor element and forming the film while monitoring a photocurrent. CONSTITUTION:The photovoltaic semiconductor element 11 such as a phototrigger thyristor is provided in a vacuum container 11, and a photocurrent is read by a meter 24. SiO or the like 29 in a crucible 28 is evaporated while irradiating the light having predetermined wavelength from a light source 25, the reflection preventive film is formed on the surface of the semiconductor element 11, and the evaporation is stopped at the point when the photocurrent becomes maximum in the thickness while monitoring the photocurrent by the meter 24.
Inventors:
TSUKAGOSHI TSUNEO
Application Number:
JP13663079A
Publication Date:
May 23, 1981
Filing Date:
October 23, 1979
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G02B1/11; H01L29/74; H01L31/0216; (IPC1-7): G02B1/10; H01L29/74; H01L31/10