FORMING METHOD OF BURIED PLUG - KAWASAKI STEEL CO

Title:

FORMING METHOD OF BURIED PLUG

Document Type and Number:

Japanese Patent JPH06267956

Kind Code:

A

Abstract:

PURPOSE: To provide a forming method of buried plug capable of selectively forming the buried plug comprising a low resistant Al metal of good quality.

CONSTITUTION: A wiring metallic film 3 is formed on an SiO2 film 2 so as to form an interlayer insulating film 4 on this wiring metallic film 3. This insulating film 4 is selectively removed to form a via hole 40. Next, DMAH gas is fed to selectively form a pure Al metal 5 inside this via hole 4a. Next, the feeding of the DMAH gas is stopped to be substituted with CpCuTEP gas to selectively form a Cu film 6 only on the Al metal 5. Later, the Cu film 6 is heat-treated to diffuse Cu into the Al metal 5 to selectively form a buried plug comprising AlCu. Besides, the residual Cu film 5 not yet completely diffused into the Al metals is to be removed.

Inventors:

YAMAMOTO HIROSHI
KATAGIRI TOMOHARU
KONDO HIDEKAZU
OOTA TOMOHIRO

Application Number:

JP5423093A

Publication Date:

September 22, 1994

Filing Date:

March 15, 1993

Export Citation:

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Assignee:

KAWASAKI STEEL CO

International Classes:

H01L21/285; H01L21/28; H01L21/3205; H01L21/768; H01L23/52; (IPC1-7): H01L21/3205; H01L21/285; H01L21/90

Attorney, Agent or Firm:

Yoshiki Hasegawa (3 outside)

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