Title:
FORMING METHOD OF CONTACT HOLE AND ALIGNER
Document Type and Number:
Japanese Patent JP2004055898
Kind Code:
A
Abstract:
To obtain a formation method of a contact hole which enables easy formation of a contact hole such as an isolated hole and a dense hole of a uniform size and an aligner.
A contact hole is formed by performing bias correction for the size of a contact hole pattern on a reticle all to the same size without changing a central position of a designed contact hole by using the reticle.
Inventors:
KAWASHIMA MIYOKO
Application Number:
JP2002212654A
Publication Date:
February 19, 2004
Filing Date:
July 22, 2002
Export Citation:
Assignee:
CANON KK
International Classes:
G03F1/36; G03F1/68; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F1/08; G03F7/20
Attorney, Agent or Firm:
Yukio Takanashi
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