PURPOSE: To expose with a high accuracy and high resolution even if a beam is variably reduced by optimally regulating a lens intensity of beam converging means, accurately focusing a charged particle beam of a predetermined rectangular size on an opening surface of beam shaping means, and flattening distribution characteristics of its current density.
CONSTITUTION: Charged particles 11A of a rectangular size passed through beam shaping means 13A are variably shaped to a rectangular size [vertical ×lateral] based on beam shaping means 13B, and passed in a state that a beam 11A of the state or rectangular size is reduced as much as possible. A beam current reaching a sample for a plurality of rectangular sizes is measured at each converging intensity. An optimum converging intensity is extracted based on various evaluation values for variations in the rectangular sizes of the beam 11A. Thus, even if the beam is variably contracted, exposure of a high accuracy and high resolution can be performed.
YAMADA AKIO
TAKAHASHI YASUSHI
KITAZAWA OSAMU
