FORMING METHOD OF MICRO-STRUCTURAL BODY, MICRO-STRUCTURAL BODY AND OPTICAL SWITCH

Title:

FORMING METHOD OF MICRO-STRUCTURAL BODY, MICRO-STRUCTURAL BODY AND OPTICAL SWITCH

Document Type and Number:

Japanese Patent JP2004261949

Kind Code:

A

Abstract:

To provide a forming method of a micro-structural body capable of decreasing surface roughness of a side surface of the micro-structural body, the micro-structural body and an optical switch.

At first, a resist layer 16 is formed on an electrically conductive layer 9 formed on a surface of an Si substrate 8 and a cantilever 10. Continuously, the resist layer 16 is patterned by X ray lithography, and a recessed part 17 opened on an upper surface is formed on the substrate 8. Continuously, a metal film 11b of Au is formed on an inner wall surface 17a of the resist layer 16 forming the recessed part 17 by deposition, etc. Thereafter, a mirror base part 11a is formed in the recessed part 17 by plating, etc. and thereafter, the resist layer 16 is removed.

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Inventors:

MIURA KOSUKE

Application Number:

JP2003057496A

Publication Date:

September 24, 2004

Filing Date:

March 04, 2003

Export Citation:

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Assignee:

SUMITOMO ELECTRIC INDUSTRIES

International Classes:

G02B26/08; B81B3/00; B81C1/00; (IPC1-7): B81C1/00; B81B3/00; G02B26/08

Attorney, Agent or Firm:

Yoshiki Hasegawa
Tatsuya Shioda
Shiro Terasaki
Masatoshi Shibata

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