Title:
FORMING METHOD OF OPTICAL WAVEGUIDE DEVICE
Document Type and Number:
Japanese Patent JP3932242
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a forming method of an optical waveguide device capable of preventing the variation of the polarization characteristic of an optical waveguide polarizer, and obtaining the high extinction ratio stably in the optical waveguide device having the optical waveguide polarizer of a metal loading type.
SOLUTION: An optical waveguide 2 and a buffer layer 3 are formed in a substrate 1 with the electro-optic effect. Next, the first opening part 8 is formed by removing the buffer layer 3 by the non-reactivity dry etching partially. Next, the optical waveguide polarizer 4 of the metal loading type is formed in the first opening part 8. Next, a signal electrode 5 being an electrode for the modulation and an earth electrode 6 are formed on the buffer layer 3.
Inventors:
Yasuyuki Miyama
Hirotoshi Nagata
Toshihiro Sakamoto
Hirotoshi Nagata
Toshihiro Sakamoto
Application Number:
JP2000040575A
Publication Date:
June 20, 2007
Filing Date:
February 18, 2000
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
G02B6/13; G02F1/035; G02B6/12; (IPC1-7): G02F1/035; G02B6/13; G02B6/12
Domestic Patent References:
| JP4350826A | ||||
| JP11111688A | ||||
| JP7168043A | ||||
| JP4304416A | ||||
| JP4180034A | ||||
| JP4258918A | ||||
| JP381742A | ||||
| JP4889711A |
Other References:
H.Nagata et al.,Journal of Materials Research,2000年 2月23日,Vol.15, No.2, p.476-482
Attorney, Agent or Firm:
Tamura
Junko Sugimura
Junko Sugimura