To prevent the occurrence of a short circuit between an upper electrode and a lower electrode while controlling the upper electrode into a uniform shape.
A forming method is used for forming a piezoelectric actuator for an inkjet head that is formed at the upper part of a diaphragm 120 so as to provide driving force for ink discharge to each of a plurality of pressure chambers 113. The forming method includes a step for forming the lower electrode 141 on the diaphragm, a step for forming each piezoelectric film 142 at a position corresponding to each of a plurality of the pressure chambers on the lower electrode, a step for forming a protection film 150 for covering the lower electrode and each piezoelectric film, a step for exposing the upper face of each piezoelectric film while reducing a thickness of the protection film and that of each piezoelectric film, a step for forming the upper electrode 143 on the upper face of each piezoelectric film, and a step for removing the protection film.
COPYRIGHT: (C)2007,JPO&INPIT
LEE KYO-YEOL
TEI ZAIYU
LEE HWA SUN
LEE JAE-CHANG
Yasuo Nara
Katsuyuki Utani
Ken Fujita
Masanori
Toshihiro Hasegawa
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