To provide a four-wire electrostatic actuator wherein it is possible to enhance a dielectric strength and suppress charging/discharging between wirings.
The electrostatic actuator includes: a stator 1 having at least four wire electrodes 1a to 1d arranged parallel to one another at equal intervals; and a mover 2 movably placed on the stator 1. Rectangular-wave or sine-wave signals, opposite to each other in phase, are inputted to the first wire electrode 1a and the third wire electrode 1c. Rectangular-wave or sine-wave signals, opposite to each other in phase, are inputted to the second wire electrode 1b and the fourth wire electrode 1d, respectively. Two signals inputted to electrodes adjoining to each other are mutually shifted by one-fourth period. The four wire electrodes 1a to 1d are provided on one side with two bus lines 101a, 101b extended in the direction orthogonal to the four wire electrodes 1a to 1d and respectively connected to the first and second wire electrodes 1a, 1b.
| JP2005065467A | 2005-03-10 | |||
| JPH0898563A | 1996-04-12 | |||
| JPH04271284A | 1992-09-28 |
Yasukazu Sato
Yasushi Kawasaki
Takeshi Sekine
Akaoka Akira
Tomoya Deguchi