Title:
FRAME CARRYING EQUIPMENT IN BONDING APPARATUS
Document Type and Number:
Japanese Patent JP3154608
Kind Code:
B2
Abstract:
PURPOSE: To obtain a carrying equipment capable of contributing to the improvement of working efficiency and cost reduction of a bonding apparatus by equipping specific frame carrying means and frame sending means respectively.
CONSTITUTION: This equipment is equipped with frame carrying means for carrying frames L/F for carrying in and out the frame L/F for bonding stage 155 and, differently from the above, frame sending-out means 61 for sending out the frame L/F carried out from the bonding stage 155 toward a post stage by means of the frame carrying means. The frame sending-out means 61 guides a sending-out member 61g by linking with the frame L/F and also guides the sending-out member 61g in the frame sending direction and also has guide displacement means 61s for giving conversion between a first position in a frame carrying route and a second position for departing from the frame carrying route as well as drive force applying means 61b for giving the drive force to the sending-out member 61g.
Inventors:
Torigoe, Satokura
Application Number:
JP34082193A
Publication Date:
April 09, 2001
Filing Date:
December 09, 1993
Export Citation:
Assignee:
KAIJO CORP
International Classes:
H01L21/60; H01L21/50; (IPC1-7): H01L21/50
Attorney, Agent or Firm:
羽切 正治