To solve a problem that it is difficult to adjust a frequency in a wide vibration frequency range since one ion gun is capable of dealing with just frequency adjustment of either a high frequency piezoelectric element or a low frequency piezoelectric element in a conventional frequency adjusting apparatus for a piezoelectric element.
In the frequency adjusting apparatus for the piezoelectric element, an inert gas molecule is ionized in a discharge chamber, the ion is taken out of the discharge chamber and accelerated by a shield electrode plate and an ion acceleration electrode plate, and the ion is made collide with a metallic electrode film on a surface of a piezoelectric board to flick away molecules comprising the electrode film, such that a vibration frequency of the piezoelectric board is regulated. Sizes and/or forms of a first ion passing port provided on the shield electrode plate located in an ion jet port of the discharge chamber and a second ion passing port provided on the ion acceleration electrode plate are different.
TSUNODA SHINJI
EMOTO HIROSHI
