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Patent Searching and Data


Title:
FREQUENCY ADJUSTMENT DEVICE FOR PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC FREQUENCY ADJUSTING METHOD
Document Type and Number:
Japanese Patent JPH0818372
Kind Code:
A
Abstract:

PURPOSE: To adjust a frequency with high precision by measuring and adjusting the oscillation frequency of the piezoelectric element at the same time while etching the piezoelectric element by irradiating the element with ions and electrons, shortening the adjusting process time, and measuring the frequency in real time.

CONSTITUTION: The argon ions 3 emitted by an argon ion source 4 and the electrons 8 emitted by an electron beam source 9 pass through a metallic mask 10 for etching to irradiate the piezoelectric element 5, and a metallic electrode 16, etc., provided to the piezoelectric element 5 is etched. At this time, the current flowing to the electron beam source 9 is so set that the value of a current measuring instrument 13 connected to the metallic mask 10 for etching is sufficiently small. Further, the oscillation frequency of the piezoelectric element 5 is measured by an oscillation frequency measuring instrument 12 simultaneously with the etching.


Inventors:
YABE SATORU
HARADA AKINOBU
NAKAMURA TADASHI
SUZUKI HIROYUKI
Application Number:
JP14358094A
Publication Date:
January 19, 1996
Filing Date:
June 24, 1994
Export Citation:
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Assignee:
SEIKO INSTR INC
International Classes:
H03H3/04; (IPC1-7): H03H3/04
Attorney, Agent or Firm:
Keinosuke Hayashi (1 person outside)