Title:
弾性表面波装置の周波数調整方法、弾性表面波装置および電子機器
Document Type and Number:
Japanese Patent JP4148225
Kind Code:
B2
Abstract:
A method for adjusting frequency of a surface acoustic wave device includes performing a frequency adjustment. The surface acoustic wave device includes a substrate including at least one of a lithium tantalate substrate, a lithium niobate substrate, and a lithium tetraborate substrate. The surface acoustic wave device further includes an IDT electrode formed on the substrate that excites a pseudo-longitudinal leaky surface acoustic wave. The performing includes frequency adjustment by adjusting a thickness of the substrate at a side opposite in a thickness direction to a side on which the IDT electrode is formed.
Inventors:
Masahiro Oshio
Application Number:
JP2005031525A
Publication Date:
September 10, 2008
Filing Date:
February 08, 2005
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H03H3/10; H03H9/02; H03H9/05; H03H9/10; H03H9/64
Domestic Patent References:
| JP9098055A | ||||
| JP8288788A | ||||
| JP2003069380A | ||||
| JP2000315928A | ||||
| JP2004215227A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa