弾性表面波装置の周波数調整方法 - MURATA MANUFACTURING CO.,LTD.

Title:

弾性表面波装置の周波数調整方法

Document Type and Number:

Japanese Patent JP4370882

Kind Code:

B2

Abstract:

To provide a frequency adjustment method for a surface acoustic wave apparatus whereby the frequency can be adjusted without much incurring deterioration in the characteristics such as deterioration in an insertion loss and a load on environment is relieved.

The frequency adjustment method for the surface acoustic wave apparatus including a piezoelectric substrate 1 and an insulation film formed on the piezoelectric substrate 1 to cover interdigital electrodes 2 formed on the piezoelectric substrate applies plasma processing to the insulation film 3 to modify the surface of the insulation film 3 thereby changing the frequency.

Inventors:

Nakajima Koji
Kenji Sakaguchi

Application Number:

JP2003380798A

Publication Date:

November 25, 2009

Filing Date:

November 11, 2003

Export Citation:

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