PURPOSE: To control the central frequency of the pass band by evaporating through sputtering the insulating film on the opposing electrodes of the comb-line electrodes provided on the substrate at the final stage of the manufacturing process.
CONSTITUTION: Comb-line electrodes 2 and 2' are provided on substrate 1; piezoelectric substance 3 of 2.5μ thick is evaporated by sputtering on the comb-line electrodes; and furthermore opposing electrodes 4 and 4' are provided on substance 3. Thus a surface wave device is formed. In case the device thus manufactured in out of the standard, the insulator is evaporated by sputtering about 1000 on the device. As a result, the sound speed can be changed within the device, and the central frequency of the device is controlled to obtain the standardized products.
JPS524830U | 1977-01-13 | |||
JPS5230361A | 1977-03-08 |