Title:
摩擦真空ポンプ
Document Type and Number:
Japanese Patent JP4819277
Kind Code:
B2
Abstract:
The disc-form component parts(6,7) supporting the rotor and stator blade rows extend radially and the longitudinal axes of the blades(2,3) extend axially. Medium flows through the pump from the outside inwards, and the blade width decreases from the outside inwards. The stationary component(7) supporting the stator blades is a component part of the pump casing(8). The pump is of double or multiflow configuration, and several radially feeding pump stages may be arranged axially one behind the other.
Inventors:
Heinrich Englender
Application Number:
JP2001556016A
Publication Date:
November 24, 2011
Filing Date:
January 24, 2001
Export Citation:
Assignee:
Leybold Vakuum GmbH
International Classes:
F04D17/16; F04D17/12; F04D23/00
Domestic Patent References:
| JPS63297793A | 1988-12-05 |
Foreign References:
| US5417544A | 1995-05-23 |
Attorney, Agent or Firm:
Toshio Yano
Takuya Kuno
Einzel Felix-Reinhard
Takuya Kuno
Einzel Felix-Reinhard