Title:
FUJUNBUTSUNO SENTAKUKAKUSANHO
Document Type and Number:
Japanese Patent JPS5194763
Kind Code:
A
Application Number:
JP2056075A
Publication Date:
August 19, 1976
Filing Date:
February 18, 1975
Export Citation:
International Classes:
C30B31/06; H01L21/22; H01L21/31; (IPC1-7): B01J17/34; H01L21/22; H01L21/31