Title:
ヒューム判定方法、基板処理方法、および基板処理装置
Document Type and Number:
Japanese Patent JP6978980
Kind Code:
B2
Abstract:
In equipment that supplies a processing liquid on a top surface of a substrate while holding the substrate horizontally in a chamber a generation status of fumes is determined. Specifically, an image of a predetermined imaging area in the chamber is captured. Then, the generation status of fumes in the chamber is determined based on luminance values of the captured image acquired by the capturing of an image. Accordingly, it is possible to quantitatively determine whether a generation status of fumes in a chamber is normal.
More Like This:
Inventors:
Toru Endo
Masayuki Hayashi
Nobuyuki Shibayama
Eiji Gracehara
Kakuma Hiroaki
Recorded History Okita
Tatsuya Masui
Masayuki Hayashi
Nobuyuki Shibayama
Eiji Gracehara
Kakuma Hiroaki
Recorded History Okita
Tatsuya Masui
Application Number:
JP2018102167A
Publication Date:
December 08, 2021
Filing Date:
May 29, 2018
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; H01L21/027
Domestic Patent References:
| JP201790232A | ||||
| JP2016122681A | ||||
| JP201056405A |
Foreign References:
| US20130113939 |
Attorney, Agent or Firm:
Takami Nishida