Title:
機能素子およびその製造方法、ならびに流体吐出ヘッド
Document Type and Number:
Japanese Patent JP4617743
Kind Code:
B2
Inventors:
Yamaguchi Seiya
Application Number:
JP2004198989A
Publication Date:
January 26, 2011
Filing Date:
July 06, 2004
Export Citation:
Assignee:
ソニー株式会社
International Classes:
B41J2/045; B41J2/055; B41J2/16; B81B3/00; B81C1/00; C23C14/34
Domestic Patent References:
| JP2004106232A | ||||
| JP2003332587A | ||||
| JP11010882A | ||||
| JP2005502481A |
Foreign References:
| WO1999034979A1 |
Attorney, Agent or Firm:
Takahisa Sato