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Title:
FUNCTIONAL RESIN AND PHOTOSENSITIVE RESIN COMPOSITION USING THE SAME
Document Type and Number:
Japanese Patent JP2003261627
Kind Code:
A
Abstract:

To provide a resin in which whose directional property, anisotropy, or the like to its optical transparency or photopermeability are given, a photosensitive resin composition using the resin, and a pattern formation method using the composition.

The resin is constituted of a unit-M described by formula (1): -[R3-(Y)p]n-R4, wherein Y is a group having an unsaturated bond; R3 and R4 are each an aromatic or non-aromatic ring group which may have a substitutional group, and n and p are 0 or 1. The resin may be a homopolymer or copolymer of a polymerizable compound described by formula (2), wherein A and B are each a bonding group; X is a spacer; R1 is a hydrogen atom or a methyl group; R2 is an alkylene group or an arylene group; a, b and m are each 0 or 1; -M group is the same as described by formula 1, but it does not occur that a and b are 0 simultaneously.


Inventors:
YAMAKI SHIGERU
Application Number:
JP2002065736A
Publication Date:
September 19, 2003
Filing Date:
March 11, 2002
Export Citation:
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Assignee:
KANSAI RES INST
International Classes:
G03F7/033; C08F216/12; C08F220/10; C08F220/54; C08F226/02; G03F7/039; G03F7/38; H01L21/027; (IPC1-7): C08F220/10; C08F216/12; C08F220/54; C08F226/02; G03F7/033; G03F7/039; G03F7/38; H01L21/027
Domestic Patent References:
JP2001337329A2001-12-07
JPH10338879A1998-12-22
Attorney, Agent or Firm:
Mitsuo Hokita