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Patent Searching and Data


Title:
FURNACE
Document Type and Number:
Japanese Patent JP2002124482
Kind Code:
A
Abstract:

To prevent the occurrence of particles in a medium not heated when a furnace port cover 11 is moved downward and to prevent a reaction tube 4 from being damaged when outer force is given to an elastic body 203.

In the furnace, a screw 202 is tightened through the elastic body 203 so as to fix it in a state where a flat flange 5 protrusively formed at the outer periphery of the reaction tube 4 is sandwiched by a heater installation stand 1 on which the heater 2 is placed and a supporting member 201, and the unheated medium carried into the reaction tube 4 is heated by the heater 2. The furnace is provided with a positioning means 301 for deciding the distance between a supporting member 201 and the heater installation stand 1 when the unheated medium in the reaction tube 4 is carried outside or when a furnace main body is not used.


Inventors:
ITO MASATAKA
Application Number:
JP2000313938A
Publication Date:
April 26, 2002
Filing Date:
October 13, 2000
Export Citation:
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Assignee:
CANON KK
International Classes:
F16B5/02; F16B9/02; F27B5/10; F27B5/14; F27D11/02; H01L21/205; H01L21/22; (IPC1-7): H01L21/22; F16B5/02; F16B9/02; F27B5/10; F27B5/14; F27D11/02; H01L21/205
Attorney, Agent or Firm:
Yamashita