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Patent Searching and Data


Title:
GAS ANALYZER
Document Type and Number:
Japanese Patent JP2001165907
Kind Code:
A
Abstract:

To provide a gas analyzer capable of measuring the total pressure of gases of a vacuum atmosphere along with the partial pressure ratio thereof and accurately measuring the total pressure of the gases.

The gas analyzer consists of an ion source, consisting of a cylindrical grids and filaments arranged outside the grids to ionize gases, the lead-out electrode adjacent to one end part of the grid to be provided on the same axis as the center axis of the grid and extracting ions, a mass analyzer for discriminating the extracted ions, a partial pressure collector for detecting the ions discriminated by mass and the total pressure collector arranged on the center axis of the grid. Two regions which diffier in the direction electric field are formed in the grids at the same time or two states having different electric field directions are formed alternately, and the total pressure and partial pressure ratio of mixed gas can be measured by the current flowing to the total pressure collector and the partial pressure collector.


Inventors:
SHIOKAWA YOSHIRO
Application Number:
JP35317899A
Publication Date:
June 22, 2001
Filing Date:
December 13, 1999
Export Citation:
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Assignee:
ANELVA CORP
International Classes:
H01J41/04; G01L21/30; G01N27/62; (IPC1-7): G01N27/62; G01L21/30; H01J41/04
Attorney, Agent or Firm:
Jiro Nakanishi