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Patent Searching and Data


Title:
GAS ANALYZER
Document Type and Number:
Japanese Patent JP2002357593
Kind Code:
A
Abstract:

To provide a technique by which a sample gas inlet section can be realized for enabling a gas analyzer utilizing membranes to satisfactorily analyze a sample gas, even if the quantity of the gas is very small.

The gas analyzer is provided with a supply space 6A connected to a continuous sample gas supply line 3' via a stop valve 5, a pressure-reduced gas transfer space 30 connected to the space 6A via a first membrane 13, and a measurement space 19 connected to the space 20 via a second membrane 18. The analyzer is also provided with a mass spectrometer 17 for analyzing the gas in the measurement space 19. The supply space 6A is constituted in a cell chamber, that is provided with a septum 14 and can freely produce an airtight state. In addition, a sampling pump 9, which enables the sample gas to be introduced into the cell chamber 6A and a pressure-reducing pump 10 which can freely reduce the pressure in the chamber 6A are installed to the chamber 6A.


Inventors:
ARITA YOSHIHIKO
Application Number:
JP2001163785A
Publication Date:
December 13, 2002
Filing Date:
May 31, 2001
Export Citation:
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Assignee:
HORIBA LTD
International Classes:
G01N27/62; G01N1/00; G01N1/22; (IPC1-7): G01N27/62; G01N1/00; G01N1/22
Attorney, Agent or Firm:
Kichi Toshio Kawa