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Patent Searching and Data


Title:
GAS BALLAST DEVICE FOR MULTISTAGE DISPLACEMENT TYPE PUMP
Document Type and Number:
Japanese Patent JP2000038986
Kind Code:
A
Abstract:

To fill gas having a sufficient rate into a displacement chamber without narrowing a cross section of a throttle part by arranging a gas filling mechanism for filling as into an intermediate vacuum chamber, and arranging the other gas filling mechanism for filling gas from the intermediate vacuum chamber into the displacement chamber.

A two stage type displacement pump is provided with two pump stages 1, 2, and an intake valve 3 and a discharge valve 4 are mounted on the first pump stage 1 in those pump stages 1, 2. Two pump stages 1, 2 are connected to each other through an intermediate vacuum chamber 5. A first gas filling mechanism 6 is arranged for filling gas into the intermediate vacuum chamber 5, and is provided with a throttle part 9. A second gas filling mechanism 7 is arranged for filling gas from the intermediate vacuum chamber 5 into a displacement chamber 8, and is provided with a throttle part 10. As a gas ballast system can be efficiently formed and a rate for filling gas into the intermediate vacuum chamber 5 can be appropriately set in the throttle part, it is possible to prevent a wrong effect from exerting on a pump characteristic.


Inventors:
BERNHARDT KARL-HEINZ
Application Number:
JP17117299A
Publication Date:
February 08, 2000
Filing Date:
June 17, 1999
Export Citation:
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Assignee:
PFEIFFER VACUUM GMBH
International Classes:
F04D19/04; F04B25/00; F04B37/14; F04B37/16; F04B37/20; F04B45/00; F04B45/033; (IPC1-7): F04B37/16; F04B45/00
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)