Title:
ガスバリア性積層体、電子デバイス用部材及び電子デバイス
Document Type and Number:
Japanese Patent JP7018872
Kind Code:
B2
Abstract:
This gas barrier laminate is comprised such that a base, a gas barrier layer and a protective layer are laminated directly or via another layer in this order, wherein a content rate of oxygen atoms is 20 to 70%, a content rate of nitrogen atoms is 0 to 30% and a content rate of silicon atoms is 25 to 50% relative to the total content of oxygen atoms, nitrogen atoms and silicon atoms in a surface layer part on a protective layer side of the gas barrier layer, and a Young's modulus at 25°C of the protective layer is not less than 5 × 10 9 Pa and not more than 1 × 10 12 Pa. According to the present invention, there are provided: a gas barrier laminate having an excellent gas barrier property, the excellent gas barrier property not being reduced over a long period of time even when it is stuck to a device having a step; a member for an electronic device composed of the gas barrier laminate; and an electronic device comprising the member for electronic device.
Inventors:
Satoshi Naganawa
Wataru Iwaya
Yoshiaki Hagiwara
Wataru Iwaya
Yoshiaki Hagiwara
Application Number:
JP2018508072A
Publication Date:
February 14, 2022
Filing Date:
March 28, 2017
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
B32B7/022; H01L27/32; H01L51/50; H05B33/02; H05B33/04; H05B33/14
Domestic Patent References:
| JP2010027561A | ||||
| JP2007296691A | ||||
| JP2008132643A | ||||
| JP2011194587A | ||||
| JP2016528071A |
Foreign References:
| WO2010107018A1 |
Attorney, Agent or Firm:
Haruhito Oishi
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