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Title:
GAS BEARING
Document Type and Number:
Japanese Patent JP2011085155
Kind Code:
A
Abstract:

To provide a gas bearing having a simple structure and high damping property.

A projecting face 6 is formed on a movable part 1 to which a bearing pad 2 is attached, and the projecting face 6 is opposed to a fixed part 4 via a minute gap of 0.1 μm to 40 μm formed therebetween. When disturbance acts on the movable part 1, a squeeze air film is formed in the gap between the projecting face 6 and the fixed part 4. The squeeze air film generates the pressure proportional to a relative speed in a vertical direction to the projecting face 6, therefore the damping property is improved and also self-excitation vibration of the gas bearing can be suppressed.


Inventors:
Shimada, Keisuke
Hashizume, Hitoshi
Application Number:
JP2009000236416
Publication Date:
April 28, 2011
Filing Date:
October 13, 2009
Export Citation:
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Assignee:
CANON INC
International Classes:
F16C32/06
Domestic Patent References:
1994-09-06
2005-11-04
2007-09-27
2004-05-20
2006-09-21
1994-09-06
2005-11-04



 
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