Title:
GAS BEARING
Document Type and Number:
Japanese Patent JP2011085155
Kind Code:
A
Abstract:
To provide a gas bearing having a simple structure and high damping property.
A projecting face 6 is formed on a movable part 1 to which a bearing pad 2 is attached, and the projecting face 6 is opposed to a fixed part 4 via a minute gap of 0.1 μm to 40 μm formed therebetween. When disturbance acts on the movable part 1, a squeeze air film is formed in the gap between the projecting face 6 and the fixed part 4. The squeeze air film generates the pressure proportional to a relative speed in a vertical direction to the projecting face 6, therefore the damping property is improved and also self-excitation vibration of the gas bearing can be suppressed.
Inventors:
SHIMADA KEISUKE
HASHIZUME HITOSHI
HASHIZUME HITOSHI
Application Number:
JP2009236416A
Publication Date:
April 28, 2011
Filing Date:
October 13, 2009
Export Citation:
Assignee:
CANON KK
International Classes:
F16C32/06
Domestic Patent References:
JPH06249239A | 1994-09-06 | |||
JP2005307993A | 2005-11-04 | |||
JP2007247704A | 2007-09-27 | |||
JP2004144188A | 2004-05-20 | |||
JP2006250318A | 2006-09-21 | |||
JPH06249239A | 1994-09-06 | |||
JP2005307993A | 2005-11-04 |
Attorney, Agent or Firm:
Kazuo Chikajima
Yoshiro Sakamoto
Yoshiro Sakamoto